CG MATERIAL
Tantalum Nitride Powder (TaN), CAS No 12033-62-4
Tantalum Nitride Powder (TaN), CAS No 12033-62-4
Tantalum Nitride Powder (TaN) is a refractory material that is a combination of tantalum and nitrogen. It is a gray metallic powder that is highly resistant to heat and corrosion. Tantalum Nitride has a high melting point and is a good conductor of electricity. It is commonly used in the production of semiconductor devices, coatings for cutting tools, and wear-resistant parts.
Tantalum Nitride Powder is produced through various methods including chemical vapor deposition, sputtering, and reactive magnetron sputtering. It is available in a range of particle sizes and purities, depending on the specific application requirements.
In semiconductor manufacturing, Tantalum Nitride is commonly used as a barrier layer in the production of copper interconnects. It is also used as a diffusion barrier in the production of advanced memory devices. In addition, Tantalum Nitride is used as a coating material for cutting tools and wear-resistant parts due to its excellent wear resistance and hardness.
Tantalum Nitride Properties (Theoretical)
| Compound Formula | NTa |
|---|---|
| Molecular Weight | 194.95 |
| Appearance | solid |
| Melting Point | 3090 °C |
| Boiling Point | N/A |
| Density | 14.3 g/cm3 |
| Solubility in H2O | N/A |
| Exact Mass | 194.95458 g/mol |
| Monoisotopic Mass | 194.95458 g/mol |
| Purity | 99.0% - 99.9% |
| CAS | 12033-62-4 |
| Molecular Formula | TaN |
Tantalum Nitride Powder Chemical Analysis
|
Product |
Purity (%) |
Particle D50 (μm) |
Impurity (%) |
|||||||
|
N |
O |
Fe |
Ni |
Cr |
K |
Na |
Si |
|||
|
CG-TaN-1 |
99.5 |
＜1.0 |
6.8 |
0.35 |
0.003 |
0.003 |
0.003 |
0.003 |
0.001 |
0.005 |
|
CG-TaN-2 |
99.5 |
1.0-3.0 |
6.8 |
0.2 |
0.003 |
0.003 |
0.003 |
0.003 |
0.001 |
0.005 |
Tantalum Nitride Powder Properties
Tantalum Nitride (TaN) Powder has high purity. It is insoluble in water, and acid, and slightly soluble in aqua media. It is soluble in potassium hydroxide to decompose ammonia. It releases nitrogen when heated to 2000℃.
Tantalum Nitride Powder Applications
- Used to make precise sheet resistors
- Used as an additive for superhard materials
Packaging
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